Electronics emissions control factors
[/business/processes/production/electronics/etchingandcvdcleaning/emissionscontrol]
The category /business/processes/production/electronics/etchingandcvdcleaning/emissionscontrol contains data on the effect on emissions of emissions control technologies implemented in the electronics industry. This category is used a look-up reference for calculation made in the Etching and CVD cleaning methodology and cannot be used to create profile items in itself.
UID | Label | |
---|---|---|
P2IHRT98UNWF | c-C4F8 | |
HVUL5TO4T8E1 | C2F6 | |
I3I8SXJ4XYJ3 | C3F8 | |
WWF881UXIYQ8 | CF4 | |
WW6RDYOGCED9 | CHF3 | |
QYC38GDLIPIW | NF3 | |
XF48PU6ZBSEK | SF6 |
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Name: Electronics_emissions_control_factors
Full path: /business/processes/production/electronics/etchingandcvdcleaning/emissionscontrol
Parent Category: Etching and CVD cleaning in the Electronics Industry
Provenance: IPCC